Case study: heater for research facility

The Key to Key-Technologies

SiC, silicon carbide, is a key material of the future. It enables more efficient and sustainable technologies and plays a key role in tackling global challenges such as the energy transition and the reduction of CO2emissions.

Engineers, institutes and scientists around the world are therefore working hard to perfect SiC crystal growth processes.

With our expertise, we help to ensure that the challenging manufacturing process at extreme temperatures of up to 2,000°C and beyond is carried out reliably and precisely to the highest quality standards.

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Background

SiC is grown in the form of single crystals, i.e. material that consists of a single, perfectly ordered crystal structure. This cultivation is necessary because only flawless single crystals provide the properties that are required in high-tech applications.

The process of crystal growth is often carried out using the sublimation method (also known as “physical vapor transport”). The raw material (e.g. silicon from quartz) is vaporized at extremely high temperatures and then deposited on a cooler seed crystal, where it grows layer by layer.

Overview

Industry:

Research & development, semiconductor technology

Procedure:

SiC crystal growing, Physical Vapour Transport (PVT)

Solution:

Stable and high-performance heating system for integration into an existing crystal growing furnace

Services:

Consulting, design/engineering, technical documentation

Result:

Increasing and ensuring process stability, quality and safety, simple handling and cost reduction

The challenge

The production of SiC is expensive, as both the raw materials and the necessary equipment and energy expenditure require considerable investment. The material yield is often limited, which further increases the costs.
The manufacturing process must therefore run smoothly and without interruptions or failures. The reliable quality of all components is therefore absolutely essential.

In addition, the properties of the crystals must be of consistent quality with every run. Defects significantly impair the electrical properties. Perfect control of the conditions in the furnace is therefore essential.

The specific task: quality on a laboratory scale

The further development of semiconductor technology requires constant research and development in order to optimize the quality of crystals, conquer new areas of application and define standards.

Particularly in the field of application under discussion here, international cutting-edge research, only components of the highest quality and consistency are used. In this case, a heater was needed for a laboratory-scale crystal growing system, along with the relevant advice.

For an existing stove with specified performance and construction data, a heater should be designed that reliably delivers the following results:

  • Homogeneous surface heating
  • High temperature stability
  • Precise control of the target temperature
Graphite Materials - Fallstudien - Heizer - Heizer

Process results

In close cooperation with our customer’s research department, our engineers developed a heating system consisting of a heater and connections and provided the technical documentation. Thanks to Graphite Materials’ extensive knowledge of materials and processes, our team completed the task in around three months, from initial contact and engineering to the actual order.

The result

The new heating system enables a stable process and a homogeneous temperature field in the PVT growth crucible at temperatures consistently above 2000°C, which enables a higher process yield.

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